[H-5-4] Silicon-Nitride-Coated Silicon Biochip for Real-time Optical Sensing of Biomolecular Interaction
Toru Fujimura、Shin-ichi Taniguchi、Kei Takenaka、Yasushi Goto
(1.Advanced Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.2005.H-5-4