[P1-12] Work Function Adjustment by Nitrogen Incorporation in HfN Gate Electrode

Chao-Sung Lai, Shing-Kan Peng, Jer-Chyi Wang, Tung-Ming Pan, Kung-Ming Fan, Jian-Yi Wong (1.Department of Electronic Engineering, Chang Gung University, 2.Nanya Technology Corporation)

https://doi.org/10.7567/SSDM.2005.P1-12