[P1-12] Work Function Adjustment by Nitrogen Incorporation in HfN Gate Electrode

Chao-Sung Lai、Shing-Kan Peng、Jer-Chyi Wang、Tung-Ming Pan、Kung-Ming Fan、Jian-Yi Wong (1.Department of Electronic Engineering, Chang Gung University、2.Nanya Technology Corporation)

https://doi.org/10.7567/SSDM.2005.P1-12