[P1-14] Germanium Out-Diffusion in HfO2 and its Impact on Electrical Properties

Qingchun Zhang, Nan Wu, Chunxiang Zhu, L.K. Bera (1.Silicon Nano Device Lab, Department of Electrical and Computer Engineering, 2.National University of Singapore, 3.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2005.P1-14