[P1-3] Thermal Stability of the Yttrium Aluminate Film and the Suppression of its structural change and electrical properties degradation

Takashi Yamamoto、Yukiko Izumi、Takashi Miyamoto、Hirohumi Seki、Hideki Hashimoto、Minoru Inoue、Masanori Oosawa、Satoshi Hasaka、Yoshihiro Sugita、Kazuto Ikeda (1.Toray Research Center, Inc.、2.TAIYO NIPPON SANSO CORPORATION、3.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2005.P1-3