[P1-4] Effect Of Starting Interface in Scalability/Device Performance of Ultra-Scaled ALD HfSiON/TiN Gate Stacks

M.A. Quevedo-Lopez、S. A. Krishnan、P.D. Kirsch、J. Peterson、H.-J Li、M. Kim、C. Huffman (1.SEMATECH、2.Texas Instruments、3.IBM、4.Infineon、5.University of Texas at Dallas)

https://doi.org/10.7567/SSDM.2005.P1-4