The Japan Society of Applied Physics

[P1-5] A New Method to Correct Capacitance of High-leakage Ultra-thin Gate Dielectric

Bing-Yue Tsui、Yun-Pei Huang、Feng-Chiu Hsieh、Wei-Hao Wu (1.Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University、2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2005.P1-5