[P1-5] A New Method to Correct Capacitance of High-leakage Ultra-thin Gate Dielectric

Bing-Yue Tsui, Yun-Pei Huang, Feng-Chiu Hsieh, Wei-Hao Wu (1.Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University, 2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2005.P1-5