[P11-5] Vacuum Pressure Sensors Using Carbon Nanotubes as Electron Emitters

S. J. Kim, N. K. Choi, J. O. Jeon, S. H. Lee, C. J. Lee (1.Kyungnam University, Div. of Electronic and Electrical Engineering, 2.Hanyang University, Department of Nanotechnology)

https://doi.org/10.7567/SSDM.2005.P11-5