[P2-4] Effect of Pore Generating Materials on the Electrical and Mechanical Properties of Porous Low-k Films

Suhan Kim、Junhee Hahn、Kookheon Char (1.School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Center, Seoul National University、2.Division of Chemical Metrology & Materials Evolution, Korea Research Institute of Standards and Science)

https://doi.org/10.7567/SSDM.2005.P2-4