[P2-5] Grating Metal Structure with Low-K BCB and Electroplated Copper for High-Q Spiral Inductors

Sung-Ku Yeo, Seong-Ho Shin, Ju-Hyang Lee, Young-Se Kwon (1.Department of Electrical Engineering and Computer Science, KAIST)

https://doi.org/10.7567/SSDM.2005.P2-5