UV-Raman Spectroscopy System for Local and Global Strain Measurement in Si

Ichiro Chiba; Ryosuke Shimidzu; Kosuke Yamasaki; Daisuke Kosemura; Satoshi Tanaka; Atsushi Ogura

doi:https://doi.org/10.7567/SSDM.2005.P2-6

2005 International Conference on Solid State Devices and Materials

Sep 12, 2005 - Sep 15, 2005
International Conference Center Kobe, Kobe, Japan

[P2-6] UV-Raman Spectroscopy System for Local and Global Strain Measurement in Si

Ichiro Chiba, Ryosuke Shimidzu, Kosuke Yamasaki, Daisuke Kosemura, Satoshi Tanaka, Atsushi Ogura (1.PHOTON Design Corporation., 2.School of Science and Engineering, Meiji University)

https://doi.org/10.7567/SSDM.2005.P2-6

▲