UV-Raman Spectroscopy System for Local and Global Strain Measurement in Si

Ichiro Chiba; Ryosuke Shimidzu; Kosuke Yamasaki; Daisuke Kosemura; Satoshi Tanaka; Atsushi Ogura

doi:https://doi.org/10.7567/SSDM.2005.P2-6

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜 2005年9月15日
International Conference Center Kobe, Kobe, Japan

[P2-6] UV-Raman Spectroscopy System for Local and Global Strain Measurement in Si

Ichiro Chiba、Ryosuke Shimidzu、Kosuke Yamasaki、Daisuke Kosemura、Satoshi Tanaka、Atsushi Ogura (1.PHOTON Design Corporation.、2.School of Science and Engineering, Meiji University)

https://doi.org/10.7567/SSDM.2005.P2-6

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