[P2-7] Characterization of Self Assembled Monolayers for Ultra Low-k Films

B. Ramana Murthy、Wan Mun Yee、Ahila Krishnamoorthy、V. Anand、K.Y. Yong、S. F. Choy、K. Prasad、R. Kumar、Don C Frye (1.Semiconductor Process Technologies, Institute of Microelectronics、2.Nanyang Technological University, School of Electrical & Electronic Eng.、3.National University of Singapore, School of Electrical & Computer Eng.、4.The Dow Chemical Company)

https://doi.org/10.7567/SSDM.2005.P2-7