The Japan Society of Applied Physics

[P2-7] Characterization of Self Assembled Monolayers for Ultra Low-k Films

B. Ramana Murthy, Wan Mun Yee, Ahila Krishnamoorthy, V. Anand, K.Y. Yong, S. F. Choy, K. Prasad, R. Kumar, Don C Frye (1.Semiconductor Process Technologies, Institute of Microelectronics, 2.Nanyang Technological University, School of Electrical & Electronic Eng., 3.National University of Singapore, School of Electrical & Computer Eng., 4.The Dow Chemical Company)