[P3-12] Accurate Evaluation of Inversion-Layer Mobility and Experimental Extraction of Local Strain Effect in sub-μm Si MOSFETs

Chika Tanaka、Kazuya Ohuchi、Junji Koga (1.Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation、2.Advanced CMOS Technology Department, SoC R&D Center, Semiconductor Company, Toshiba Corporation)

https://doi.org/10.7567/SSDM.2005.P3-12