[P6-9] P-type doping for Be/C co-implantation in GaN

K. T. Liu, Y. K. Su, S. J. Chang, Y. Horikoshi (1.Department of Electronic Engineering, Cheng Shiu University, 2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, 3.School of Science and Engineering, Waseda University)

https://doi.org/10.7567/SSDM.2005.P6-9