[P7-15] Novel Fabrication Technique of Optical Waveguides using Low Density Silicon Nitride Films Deposited by Plasma-Enhanced Chemical Vapor Deposition

Shin Yokoyama, Tomoya Kakite (1.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2005.P7-15