Fabrication of Si thin-film solar cells by hot-wire chemical vapor deposition and laser doping techniques

Shui-Yang Lien; Yen-Chia Lin; Dong-Sing Wuu; In-Cha Hsieh

doi:https://doi.org/10.7567/SSDM.2005.P7-19

[P7-19] Fabrication of Si thin-film solar cells by hot-wire chemical vapor deposition and laser doping techniques

Shui-Yang Lien、Yen-Chia Lin、Dong-Sing Wuu、In-Cha Hsieh (1.Dept. Materials Engineering, National Chung Hsing University、2.Institute of Electro-Optics and Material Science, National Formosa University、3.Department of Electrical Engineering, Da-Yeh University)

https://doi.org/10.7567/SSDM.2005.P7-19

2005 International Conference on Solid State Devices and Materials

[P7-19] Fabrication of Si thin-film solar cells by hot-wire chemical vapor deposition and laser doping techniques