[P8-5] Study of Effects of Metal Layer on Hydrogen Desorption from Hydrogenated Amorphous Silicon Using Temperature-Programmed Desorption

Yoshinori Hamaoka、Hiromasa Ohmi、Hiroaki Kakiuchi、Kiyoshi Yasutake (1.Osaka University, Dept. of Precision Science and Technology, Graduate School of Eng.)

https://doi.org/10.7567/SSDM.2005.P8-5