Fabrication of InP and InGaAs air-hole type Two-dimensional Photonic Crystals by Selective Area MOVPE

S. Hashimoto; J. Takeda; A. Tarumi; S. Hara; J. Motohisa; T. Fukui

doi:https://doi.org/10.7567/SSDM.2005.P8-6

2005 International Conference on Solid State Devices and Materials

Sep 12, 2005 - Sep 15, 2005
International Conference Center Kobe, Kobe, Japan

[P8-6] Fabrication of InP and InGaAs air-hole type Two-dimensional Photonic Crystals by Selective Area MOVPE

S. Hashimoto, J. Takeda, A. Tarumi, S. Hara, J. Motohisa, T. Fukui (1.Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University)

https://doi.org/10.7567/SSDM.2005.P8-6

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