[P8-6] Fabrication of InP and InGaAs air-hole type Two-dimensional Photonic Crystals by Selective Area MOVPE

S. Hashimoto、J. Takeda、A. Tarumi、S. Hara、J. Motohisa、T. Fukui (1.Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University)

https://doi.org/10.7567/SSDM.2005.P8-6