[A-1-3] High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy

Li Zhang, Kazuya Ohuchi, Kanna Adachi, Mitsuhiro Tomita, Kazunari Ishimaru, Mariko Takayanagi, Akira Nishiyama (1.Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation, 2.Center For Semiconductor Research & Development, Toshiba Corporation Semiconductor Company)

https://doi.org/10.7567/SSDM.2006.A-1-3