[A-3-4] Room Temperature Vacuum Sealing with Au Thin Films Using Ar Beam Surface Activation

Hironao Okada, Toshihiro Itoh, Tadatomo Suga (1.Univ. of Tokyo, Dept. of Precision Eng, School of Eng.)

https://doi.org/10.7567/SSDM.2006.A-3-4