Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba, Sr)TiO3 and Mechanism of Transient Response

[B-2-4] Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba, Sr)TiO3 and Mechanism of Transient Response

Masato Suzuki, Kazuma Nagata, Yuichiro Tanushi, Shin Yokoyama (1.Research Center for Nanodevices and Systems, Hiroshima University)