[B-7-4] Fabrication Method of Microlens Array Using Oxidized Porous Silicon Bulk Micromachining and PDMS Replication Molding

Sung-Ku Yeo, Man-Lyun Ha, Young-Se Kwon (1.Department of Electrical Engineering and Computer Science, KAIST)

https://doi.org/10.7567/SSDM.2006.B-7-4