[B-8-4L] Integrated Optical Beam Splitters Employing Symmetric Mode Mixing in SiO2/SiON/SiO2 Multimode Interference (MMI) Waveguides

Zhen-Liang Liao, Ricky W. Chuang*, Chih-Kai Chang (1.Institute of Microelectronics, Department of Electrical Engineering, and Advanced Optoelectronic Technology Center (AOTC), National Cheng Kung University)

https://doi.org/10.7567/SSDM.2006.B-8-4L