High-Q Piezoelectrically Actuated RF MEMS Tunable Capacitor

Michihiko Nishigaki; Toshihiko Nagano; Takashi Miyazaki; Takashi Kawakubo; Kazuhiko Itaya

doi:https://doi.org/10.7567/SSDM.2006.C-10-3

[C-10-3] High-Q Piezoelectrically Actuated RF MEMS Tunable Capacitor

Michihiko Nishigaki、Toshihiko Nagano、Takashi Miyazaki、Takashi Kawakubo、Kazuhiko Itaya (1.Advanced Electron Devices Laboratory, Corporate Research & Development Center, Toshiba Corporation, Toshiba Research Consulting Corporation)

https://doi.org/10.7567/SSDM.2006.C-10-3

2006 International Conference on Solid State Devices and Materials

[C-10-3] High-Q Piezoelectrically Actuated RF MEMS Tunable Capacitor