[C-10-3] High-Q Piezoelectrically Actuated RF MEMS Tunable Capacitor
Michihiko Nishigaki, Toshihiko Nagano, Takashi Miyazaki, Takashi Kawakubo, Kazuhiko Itaya
(1.Advanced Electron Devices Laboratory, Corporate Research & Development Center, Toshiba Corporation, Toshiba Research Consulting Corporation)
https://doi.org/10.7567/SSDM.2006.C-10-3
