[C-9-6] Development of Si Long Microprobe (SiLM) for Platform of Intelligent Neural Implant Microsystem

Risato Kobayashi, Taiichiro Watanabe, Ken Komiya, Takafumi Fukushima, Kazuhiro Sakamoto, Hiroyuki Kurino, Tetsu Tanaka, Norihiro Katayama, Hajime Mushiake, Mitsumasa Koyanagi (1.Department of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University, 2.Research Institute of Electrical Communication, Tohoku University, 3.Department of Applied Information Science, Graduate School of Information Sciences, Tohoku University, 4.Department of Physiology, School of Medicine, Tohoku University)

https://doi.org/10.7567/SSDM.2006.C-9-6