Self-Aligned Fabrication Process of Organic Thin-Film-Transistors on the Flexible Substrate Using Photo-Sensitive Self-Assembled Monolayers

T. Arai; N. Sato; K. Yamaguchi; M. Kawasaki; M. Fujimori; T. Shiba; M. Ando; K. Torii

doi:https://doi.org/10.7567/SSDM.2006.D-10-3

[D-10-3] Self-Aligned Fabrication Process of Organic Thin-Film-Transistors on the Flexible Substrate Using Photo-Sensitive Self-Assembled Monolayers

T. Arai, N. Sato, K. Yamaguchi, M. Kawasaki, M. Fujimori, T. Shiba, M. Ando, K. Torii (1.Hitachi, Ltd., Central Research Laboratory, 2.Department of Chemistry, Faculty of Science, Kanagawa University, 3.Hitachi, Ltd., Advanced Research Laboratory)

https://doi.org/10.7567/SSDM.2006.D-10-3

2006 International Conference on Solid State Devices and Materials

[D-10-3] Self-Aligned Fabrication Process of Organic Thin-Film-Transistors on the Flexible Substrate Using Photo-Sensitive Self-Assembled Monolayers