Performance enhancement of Organic TFT by low-energy Ar ion beam treatment onto gate dielectric surface

Sungku Kang; Jaeyoung Park; Sukmo Jung; Hoo-Jeong Lee; Moonsuk Yi

doi:https://doi.org/10.7567/SSDM.2006.D-9-3

[D-9-3] Performance enhancement of Organic TFT by low-energy Ar ion beam treatment onto gate dielectric surface

Sungku Kang, Jaeyoung Park, Sukmo Jung, Hoo-Jeong Lee, Moonsuk Yi (1.School of Electrical Engineering, Pusan National University, 2.School of Advanced Material Science, SungKyunKwan University)

https://doi.org/10.7567/SSDM.2006.D-9-3

2006 International Conference on Solid State Devices and Materials

[D-9-3] Performance enhancement of Organic TFT by low-energy Ar ion beam treatment onto gate dielectric surface