[E-8-2] Investigation of GaAs MOSFETs with Gate Oxide Grown Using Photoelectrochemical Oxidation Method

Hsin-Ying Lee, Yuan-Fu Lin, Ming-Yi Wang, Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University, 2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2006.E-8-2