[E-8-3] Passivation Effects of 100 nm In0.4AlAs/In0.35GaAs Metamorphic HEMT With Remote PECVD Grown Si3N4 Layer

Sungwon Kim, Kyoungchul Jang, Jinsik Lee, Jincherl Her, Kwangseok Seo (1.Seoul National Univ., School of Electrical Eng.)

https://doi.org/10.7567/SSDM.2006.E-8-3