[E-9-1] Methods and Mechanisms for Ohmic Contacts on AlGaN/GaN HEMTs

Ilesanmi Adesida, Fitih M. Mohammed, Liang Wang, Anirban Basu, Vipan Kumar (1.Micro and Nanotechnology Laboratory, 2.Department of Electrical and Computer Engineering, 3.Department of Material Science and Engineering University of Illinois at Urbana-Champaign)

https://doi.org/10.7567/SSDM.2006.E-9-1