Methods and Mechanisms for Ohmic Contacts on AlGaN/GaN HEMTs

Ilesanmi Adesida; Fitih M. Mohammed; Liang Wang; Anirban Basu; Vipan Kumar

doi:https://doi.org/10.7567/SSDM.2006.E-9-1

[E-9-1] Methods and Mechanisms for Ohmic Contacts on AlGaN/GaN HEMTs

Ilesanmi Adesida、Fitih M. Mohammed、Liang Wang、Anirban Basu、Vipan Kumar (1.Micro and Nanotechnology Laboratory、2.Department of Electrical and Computer Engineering、3.Department of Material Science and Engineering University of Illinois at Urbana-Champaign)

https://doi.org/10.7567/SSDM.2006.E-9-1

2006 International Conference on Solid State Devices and Materials

[E-9-1] Methods and Mechanisms for Ohmic Contacts on AlGaN/GaN HEMTs