[F-1-3] Formation of Ferroelectric Sr2(Ta1-x,Nbx)2O7 Thin Film on Amorphous SiO2 by Microwave-Excited Plasma Enhanced Metalorganic Chemical Vapor Deposition

Ichirou Takahashi、Kiyoshi funaiwa、Keita Azumi、Satoru Yamashita、Yasuyuki Shirai、Masaki Hirayama、Akinobu Teramoto、Shigetoshi Sugawa、Tadahiro Ohmi (1.New Industry Creation Hatchery Center, Tohoku University、2.Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2006.F-1-3