The Japan Society of Applied Physics

[F-5-2] Improvement of Device Characteristics Variation by using a Body-Bias Controlling Technology Based on a Hybrid Trench Isolated SOI

Y. Maki, Y. Hirano, M. Tsujiuchi, T. Iwamatsu, O. Ozawa, T. Ipposhi, Y. Inoue (1.Process Technology Development Div. Renesas Technology Corp., 2.SoC Design Technology Div. Renesas Technology Corp.)

https://doi.org/10.7567/SSDM.2006.F-5-2