[F-7-4] Lateral Redistribution and Interactive Impacts of Localized Trapped Charges during Retention Baking in SONOS Memory

Huiqing Pang、Liyang Pan、Lei Sun、Dong Wu、Jun Zhu (1.Institute of Microelectronics, Tsinghua University)

https://doi.org/10.7567/SSDM.2006.F-7-4