[F-7-4] Lateral Redistribution and Interactive Impacts of Localized Trapped Charges during Retention Baking in SONOS Memory

Huiqing Pang, Liyang Pan, Lei Sun, Dong Wu, Jun Zhu (1.Institute of Microelectronics, Tsinghua University)

https://doi.org/10.7567/SSDM.2006.F-7-4