[F-7-5L] Tunnel Oxide Optimization to Improve Post-Cycling Retention of Flash Memories

Wook-Hyun Kwon, Jung Guen Jee, Jee Hoon Han, Jung In Han, Heon Kyu Lee, Bong Yong Lee, Sang-Pil Sim, Chan- Kwang Park, Kinam Kim (1.Advanced Technology Development Team2, Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., LTD.)

https://doi.org/10.7567/SSDM.2006.F-7-5L