[G-2-2] SiOCH Films with Hydrocarbon Network Bonds: First-Principles Investigation

Nobuo Tajima, Tomoyuki Hamada, Takahisa Ohno, Katsumi Yoneda, Seiichi Kondo, Nobuyoshi Kobayashi, Manabu Shinriki, Kazuhiro Miyazawa, Kaoru Sakota, Satoshi Hasaka, Minoru Inoue (1.First Principles Simulation Group, Computational Materials Science Center, National Institute for Materials Science, 2.The FSIS Center for Collaborative Research, Institute of Industrial Science, University of Tokyo, 3.Semiconductor Leading Edge Technologies, Inc., 4.Taiyo Nippon Sanso Corporation)

https://doi.org/10.7567/SSDM.2006.G-2-2