[G-2-3] Nondestructive characterization of temperature-dependent backbone Si-O-Si structure in porous silica films by in-situ Fourier-transform infrared spectroscopy

Syozo Takada, Nobuhiro Hata, Xianying Li, Nobutoshi Fujii, Takahiro Nakayama, Takamaro Kikkawa (1.ASRC, AIST, 2.MIRAI-ASRC, AIST, 3.MIRAI-ASET, 4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2006.G-2-3