[G-2-3] Nondestructive characterization of temperature-dependent backbone Si-O-Si structure in porous silica films by in-situ Fourier-transform infrared spectroscopy

Syozo Takada、Nobuhiro Hata、Xianying Li、Nobutoshi Fujii、Takahiro Nakayama、Takamaro Kikkawa (1.ASRC, AIST、2.MIRAI-ASRC, AIST、3.MIRAI-ASET、4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2006.G-2-3