[G-2-4] Characterization of Low-k Interconnect Dielectrics by EELS Yuji Otsuka、Miyako Shimada、Naohiko Kawasaki、Shinichi Ogawa (1.Toray Research Center, Inc.、2.Semiconductor Leading Edge Technologies, Inc.) https://doi.org/10.7567/SSDM.2006.G-2-4