[G-2-4] Characterization of Low-k Interconnect Dielectrics by EELS

Yuji Otsuka, Miyako Shimada, Naohiko Kawasaki, Shinichi Ogawa (1.Toray Research Center, Inc., 2.Semiconductor Leading Edge Technologies, Inc.)

https://doi.org/10.7567/SSDM.2006.G-2-4