[G-8-3] Nondestructive characterization of dielectric stack structures by laser-pulse-generated surface acoustic wave analysis

Toshinori Takimura、Nobuhiro Hata、Yoshinori Shishida、Shinichi Chikaki、Takamaro Kikkawa (1.Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Science and Technology (AIST)、2.Millennium Research for Advanced Information Technology (MIRAI)-ASRC, AIST、3.MIRAI-Association of Super Advanced Electronics Technologies (ASET)、4.Research Center for Nanodevices and Systems, Hiroshima U.)

https://doi.org/10.7567/SSDM.2006.G-8-3