[G-8-3] Nondestructive characterization of dielectric stack structures by laser-pulse-generated surface acoustic wave analysis

Toshinori Takimura, Nobuhiro Hata, Yoshinori Shishida, Shinichi Chikaki, Takamaro Kikkawa (1.Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Science and Technology (AIST), 2.Millennium Research for Advanced Information Technology (MIRAI)-ASRC, AIST, 3.MIRAI-Association of Super Advanced Electronics Technologies (ASET), 4.Research Center for Nanodevices and Systems, Hiroshima U.)

https://doi.org/10.7567/SSDM.2006.G-8-3