[G-9-3] Self-Formation of Ti-rich Interfacial Layers in Cu(Ti) Alloy Films

Susumu Tsukimoto、Kazuhiro ITO、Masanori Murakami (1.Kyoto Univ., Dept. of Materials Science and Engineering, Graduate School of Eng.)

https://doi.org/10.7567/SSDM.2006.G-9-3