[G-9-4] New method of probing barrier integrity and low-k stability

Choong-Un Kim、D. M. Meng、W.-H. Bang、N. Michael、Y. J Park、L. Matz (1.Materials Science and Engineering, The University of Texas at Arlington、2.Silicon Technology Development, Texas Instruments)

https://doi.org/10.7567/SSDM.2006.G-9-4